Bremsstrahlung Produced by 5 keV Electrons Incident on Al2O3 and MgO Samples at Air Pressures of 30, 50, and 100 Pa

Abstract Bremsstrahlung spectra produced by 5 keV electrons incident on Al2O3 and MgO targets at air pressures of 30, 50, 100 Pa have been compared with results using pyPENELOPE, a program designed to simulate electron microscopy. The comparisons showed that the experimental were in good agreement simulated except near Duane–Hunt limit, where bremsstrahlung amplitudes consistently greater than PENEPMA predicted. discrepancies may be due charging effects, which are not PENEPMA, Monte Carlo code pyPENELOPE is based. If so, phenomena could potentially impact accuracy energy dispersive X-ray spectrometry measurements.